Vol. 362, No. 1814, Sputtering: Past, Present and Future. W. R. Grove 150th Anniversary Issue (Jan. 15, 2004), pp. 5-28 (24 pages) Measurement of the velocity distribution of sputtered atoms has ...

Thin films play a crucial role in the fabrication of several components and devices, such as protective coatings, integrated circuits, solar cells, and optical ...

The word “sputtering” may evoke images of a car engine choking before it fails, but in the high-tech world of advanced coatings, it's a high-speed, high-volume process where superfast ions hit a metal ...

Sputtering Technique Sputtering is a process wherein a controlled gas, typically chemically inert argon, is introduced into a vacuum chamber and then a cathode is electrically energized to generate a ...

Illustration of the Hall Thruster plumes impacting the carbon surfaces at the atomistic level. CREDIT Grainger College of Engineering at the University of Illinois Urbana-Champaign Electric space ...